System: trichlorosilane/dichloroethylsilane
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| 1) trichlorosilane |
| DECHEMA ID | 154 |
| Formula | Cl3HSi |
| Synonym | silicochloroform |
| Synonym | q1-2333 |
| Synonym | trichloromonosilane |
| InChi-Key | ZDHXKXAHOVTTAH-UHFFFAOYSA-N |
| Registry No. | 10025-78-2 |
| 2) dichloroethylsilane |
| DECHEMA ID | 12722 |
| Formula | C2H6Cl2Si |
| Synonym | ethyldichlorosilane |
| Synonym | monoethyldichlorosilane |
| InChi-Key | RKHXNBJRDQOIOQ-UHFFFAOYSA-N |
| Registry No. | 1789-58-8 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
| no azeotrope under specified conditions | - | 1 | 1 | View |
| vapor-liquid equilibrium, isobaric | - | 1 | 5 | View |