System: trichlorosilane/tetrachlorosilane
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| 1) trichlorosilane |
| DECHEMA ID | 154 |
| Formula | Cl3HSi |
| Synonym | silicochloroform |
| Synonym | trichloromonosilane |
| Synonym | q1-2333 |
| InChi-Key | ZDHXKXAHOVTTAH-UHFFFAOYSA-N |
| Registry No. | 10025-78-2 |
| 2) tetrachlorosilane |
| DECHEMA ID | 170 |
| Formula | Cl4Si |
| Synonym | silicon chloride (SiCl4) |
| Synonym | perchlorosilane |
| Synonym | silicon chloride |
| Synonym | silicon tetrachloride |
| Synonym | silicon(IV) chloride |
| Synonym | silicium tetrachloride |
| Synonym | z-1229 |
| Synonym | silicon-IV-chloride |
| Synonym | tetrachlorosilicon |
| InChi-Key | FDNAPBUWERUEDA-UHFFFAOYSA-N |
| Registry No. | 10026-04-7 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| no azeotrope under specified conditions | - | 3 | 3 | View |
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| vapor-liquid equilibrium, isobaric | - | 1 | 12 | View |
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| vapor-liquid equilibrium, isothermal | - | 2 | 40 | View |
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