System: trichlorosilane/chlorodimethylsilane
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| 1) trichlorosilane |
| DECHEMA ID | 154 |
| Formula | Cl3HSi |
| Synonym | trichloromonosilane |
| Synonym | q1-2333 |
| Synonym | silicochloroform |
| InChi-Key | ZDHXKXAHOVTTAH-UHFFFAOYSA-N |
| Registry No. | 10025-78-2 |
| 2) chlorodimethylsilane |
| DECHEMA ID | 1804 |
| Formula | C2H7ClSi |
| Synonym | dimethylhydrosilyl chloride |
| Synonym | dimethylchlorohydrosilane |
| Synonym | chlorodimethylhydrosilane |
| Synonym | dimethylchlorosilane |
| Synonym | me2hsicl |
| Synonym | dimethylsilyl chloride |
| Synonym | dimethylmonochlorosilane |
| InChi-Key | YGHUUVGIRWMJGE-UHFFFAOYSA-N |
| Registry No. | 1066-35-9 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| no azeotrope under specified conditions | - | 1 | 1 | View |
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| vapor-liquid equilibrium, isobaric | - | 1 | 5 | View |
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