System: trichlorosilane/dichlorosilane

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1) trichlorosilane
DECHEMA ID154
FormulaCl3HSi
Synonymtrichloromonosilane
Synonymq1-2333
Synonymsilicochloroform
InChi-KeyZDHXKXAHOVTTAH-UHFFFAOYSA-N
Registry No.10025-78-2
2) dichlorosilane
DECHEMA ID25934
FormulaCl2H2Si
InChi-KeyMROCJMGDEKINLD-UHFFFAOYSA-N
Registry No.4109-96-0

Available physical property data:

PropertyPhaseNo. of tablesNo. of linesData
no azeotrope under specified conditions-24View
vapor-liquid equilibrium-124View
vapor-liquid equilibrium, isothermal-241View