System: trichlorosilane/dichlorosilane
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| 1) trichlorosilane |
| DECHEMA ID | 154 |
| Formula | Cl3HSi |
| Synonym | trichloromonosilane |
| Synonym | q1-2333 |
| Synonym | silicochloroform |
| InChi-Key | ZDHXKXAHOVTTAH-UHFFFAOYSA-N |
| Registry No. | 10025-78-2 |
| 2) dichlorosilane |
| DECHEMA ID | 25934 |
| Formula | Cl2H2Si |
| InChi-Key | MROCJMGDEKINLD-UHFFFAOYSA-N |
| Registry No. | 4109-96-0 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| no azeotrope under specified conditions | - | 2 | 4 | View |
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| vapor-liquid equilibrium | - | 1 | 24 | View |
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| vapor-liquid equilibrium, isothermal | - | 2 | 41 | View |
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