System: tetrachlorosilane/dichlorosilane
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| 1) tetrachlorosilane |
| DECHEMA ID | 170 |
| Formula | Cl4Si |
| Synonym | silicium tetrachloride |
| Synonym | z-1229 |
| Synonym | silicon-IV-chloride |
| Synonym | tetrachlorosilicon |
| Synonym | silicon chloride (SiCl4) |
| Synonym | perchlorosilane |
| Synonym | silicon chloride |
| Synonym | silicon tetrachloride |
| Synonym | silicon(IV) chloride |
| InChi-Key | FDNAPBUWERUEDA-UHFFFAOYSA-N |
| Registry No. | 10026-04-7 |
| 2) dichlorosilane |
| DECHEMA ID | 25934 |
| Formula | Cl2H2Si |
| InChi-Key | MROCJMGDEKINLD-UHFFFAOYSA-N |
| Registry No. | 4109-96-0 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| no azeotrope under specified conditions | - | 1 | 5 | View |
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| vapor-liquid equilibrium | - | 1 | 3 | View |
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| vapor-liquid equilibrium, isothermal | - | 2 | 19 | View |
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