System: ethane/hexafluoroethane/tetrafluorosilane
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| 1) ethane |
| DECHEMA ID | 39737 |
| Formula | C2H6 |
| Synonym | R 170 |
| Synonym | ethyl hydride |
| Synonym | dimethyl |
| Synonym | bimethyl |
| Synonym | frigen 170 |
| Synonym | refrigerant 170 |
| Synonym | methylmethane |
| InChi-Key | OTMSDBZUPAUEDD-UHFFFAOYSA-N |
| Registry No. | 74-84-0 |
| 2) hexafluoroethane |
| DECHEMA ID | 40500 |
| Formula | C2F6 |
| Synonym | R 116 |
| Synonym | perfluorocarbon 116 |
| Synonym | f 116 |
| Synonym | freon 1166sy |
| Synonym | ethyl hexafluoride |
| Synonym | freon 116 |
| Synonym | r-116 |
| Synonym | 1,1,1,2,2,2-hexafluoroethane |
| Synonym | fluorocarbon 116 |
| Synonym | r116 |
| Synonym | refrigerant 116 |
| Synonym | fc 1160 |
| Synonym | un 2193 |
| Synonym | perfluoroethane |
| Synonym | fc 116 |
| Synonym | pfc 116 |
| Synonym | frigen 116 |
| Synonym | f 116 (fluorocarbon) |
| InChi-Key | WMIYKQLTONQJES-UHFFFAOYSA-N |
| Registry No. | 76-16-4 |
| 3) tetrafluorosilane |
| DECHEMA ID | 41363 |
| Formula | F4Si |
| Synonym | silicon fluoride |
| Synonym | silicon tetrafluoride |
| Synonym | silicon fluoride (SiF4) |
| InChi-Key | ABTOQLMXBSRXSM-UHFFFAOYSA-N |
| Registry No. | 7783-61-1 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| azeotrope | - | 2 | 3 | View |
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