System: dichloro(methyl)silane/dichlorodimethylsilane/trichloro(methyl)silane
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| 1) dichloro(methyl)silane |
| DECHEMA ID | 40172 |
| Formula | CH4Cl2Si |
| Synonym | Z-1218 |
| Synonym | methyldichlorosilane |
| Synonym | methyl dichlorosilane |
| Synonym | silane, dichloromethyl- |
| Synonym | MeHSiCl2 |
| InChi-Key | NWKBSEBOBPHMKL-UHFFFAOYSA-N |
| Registry No. | 75-54-7 |
| 2) dichlorodimethylsilane |
| DECHEMA ID | 40194 |
| Formula | C2H6Cl2Si |
| Synonym | dimethyldichlorosilane |
| Synonym | dichlorodimethylsilicon |
| Synonym | dimethylsilane dichloride |
| Synonym | dimethylsilane dichloriden |
| Synonym | inerton aw-dmcs |
| Synonym | me2sicl2 |
| Synonym | repel-silane |
| Synonym | z-1219 |
| InChi-Key | LIKFHECYJZWXFJ-UHFFFAOYSA-N |
| Registry No. | 75-78-5 |
| 3) trichloro(methyl)silane |
| DECHEMA ID | 40195 |
| Formula | CH3Cl3Si |
| Synonym | methylsiliciumtrichloride |
| Synonym | methylsilyl trichloride |
| Synonym | methylsilicon trichloride |
| Synonym | methyltrichlorosilane |
| Synonym | mesicl3 |
| Synonym | methyl silico chloroform |
| Synonym | z-1211 |
| Synonym | methyl trichlorosilane |
| InChi-Key | JLUFWMXJHAVVNN-UHFFFAOYSA-N |
| Registry No. | 75-79-6 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| vapor-liquid equilibrium | - | 1 | 30 | View |
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| vapor-liquid equilibrium, isobaric | - | 1 | 33 | View |
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