System: silicon oxynitride

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1) silicon oxynitride
DECHEMA ID60557
FormulaN2OSi2
Synonymdinitride disilicon oxide
InChi-KeyWGRPUJVSPCGEKW-UHFFFAOYSA-N
Registry No.12033-76-0

Available physical property data:

PropertyPhaseNo. of tablesNo. of linesData
enthalpy (related to 0 K)solid132View
entropysolid132View
heat capacity (cp)solid2128View